Browsing by Subject "H01L 21/32134"
Now showing items 1-3 of 3
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(United States. Patent and Trademark Office; Texas A&M University. Libraries, 2003-09-02)Forming an interconnect of a semiconductor device includes defining a recessed structure proximate to an outer surface of a substrate of a semiconductor device. A metal layer is deposited within the recessed structure. A ...
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(United States. Patent and Trademark Office; Texas A&M University. Libraries, 2006-05-02)A method for forming a conductive or magnetic pattern for a semiconductor or other electronic device includes patterning a mask layer outwardly from a conductive layer of the semiconductor device. The patterning defines ...
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(United States. Patent and Trademark Office; Texas A&M University. Libraries, 1989-01-31)The present invention relates to a method of producing micropores having diameters of less than 20 nanometers in straight sides in silicon film. The silicon film produced by this process may be attached to a substrate ...